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Electron Microscopy Facilities

Further information about specific instruments listed below may be obtained from the indicated MRSEC faculty contact.

JEOL 6700F FEG SEM with 1nm resolution

Amray 1860 FEG high resolution SEM

JEOL 8600 Electon microprobe

Philips 420ST TEM

300 keV HRTEM with FEG and GI

Zeiss SEM and Electron Beam Lithography System

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